Archive for May 13, 2012

Recent Advances in MEMS Sensor Technology—Biomedical Applications

Micro-electromechanical systems (MEMS) use microminiature sensors and actuators. MEMS technology provides the benefits of small size, low weight, high performance, easy mass-production and low cost. This article is the first part of a three-part series on MEMS sensors. In the present article, we provide a general introduction to MEMS sensing and the primary sensing techniques. Next, MEMS-based bio-medical sensors are explained. We consider MEMS devices that are: designed to detect triglycerides, c-reactive protein, and glucose, respectively; bio-inspired robotic fingers with tissue softness characterization sensors for pressure measurement during surgical procedures; for counting blood cells; acoustic sensors for 2-D sound source localization; pressure measurement sensors on the wings of an insect-like flying robot; and ultra-miniature sensors for intramuscular pressure measurement.
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May 13, 2012 at 8:37 am 1 comment


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